Prof. Yosi Shacham

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Prof. Yosi Shacham
Phone: 03-6408064
Fax: 03-6423508
Office: Electrical Engineering, 226

Research Interests:

Silicon-based nano-technologies; nanoline interconnect technology and multilevel metallization system;
Copper technology (metals and dielectrics) for ULSI; inspection of sub-half-micron interconnect systems (electrical, optical, X-ray and others);
Physics and technology of MOS devices


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